A. Deleniv
Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden
S. Abadei
Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden
S. Gevorgian
Department of Microtechnology and Nanoscience MC-2, Chalmers University of Technology, Sweden \ Microwave and High Speed Research Center, Ericsson AB
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Published in: GigaHertz 2003. Proceedings from the Seventh Symposium
Linköping Electronic Conference Proceedings 8:72, p.
Published: 2003-11-06
ISBN:
ISSN: 1650-3686 (print), 1650-3740 (online)
Design of a tuneable filter-phase shifter is presented. Thin ferroelectric film varactors are used to provide voltage tuneable phase shift in a silicon Coplanar Waveguide (CPW). Varactors with zero bias capacitance 0.17pf; loss tangent tand=0.04 and 20% tuneability provide continuous voltage tuneable phase shift up to 90°±5° at 19 GHz with 10% bandwidth. The figure of merit is about 30°/dB. The sizes of the phase shifter silicon chip are less than 2x5.5mm. The phase shifter is designed for possible integration in silicon MMIC`s.
