Experimental and theoretical investigation of coplanar-plate capacitors on layered dielectric substrates

Saeed Abadei
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden

Spartak Gevorgian
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden \ Core Unit Research Center, Ericsson Microwave Systems, Sweden

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Ingår i: GigaHertz 2003. Proceedings from the Seventh Symposium

Linköping Electronic Conference Proceedings 8:56, s.

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Publicerad: 2003-11-06


ISSN: 1650-3686 (tryckt), 1650-3740 (online)


In this work we report the results of theoretical and experimental investigation of coplanarplate capacitors on layered dielectric substrates. Analytic formulas are derived for the capacitance and compared with experimental results and results of Momentum simulation. The formulas are used for experimental characterization of thin ferroelectric films in a frequency range of 0.5–50 GHz; where the film parameters (permittivity; loss tangent) are extracted from measured S-parameters.


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